XPS-7II for Semiconductor / Specialty Gas

The XPS-7II detector is compact and lightweight, designed for industries using the wide range of industrial specialty gases in the manufacturing process. Such industries include semiconductor, solar cell, and electronics manufacturing.

The unique features of the XPS-7II:

  • World’s smallest NF3 portable detector
  • The same detector can be fitted with various pre-calibrated gas sensors, depending on the gas to be detected. This reduces the cost of ownership as the user only must purchase 1 detector and stock the gas sensors of interest and use them when required, instead of purchasing several units of detectors as per the conventional method.
  • The pre-calibrated sensor means that there is no need to use calibration gas to calibrate the detector.

The other features of the XPS-7II include:

  • 4-digit LCD digital display (with units) and split bar graph
  • Long lifespan integrated gas sampling pump, with automatic flow
  • Error response if a wrong gas sensor is inserted to the detector.
  • Alarm response for high gas concentration, low flow, trouble
  • Carry case and strap, quick-connect sampling hose and probe with dust/moisture trap.

Technical Data

List of Detected Gases:

NH3
SiH4
SiH2Cl2
AsH3
PH3

B2H6
H2Se
GeH4
Cl2
ClF3

HCl
HF
HBr
NO
H2S

CO
Si2H2
F2
O3
NF3

*some gases not listed

      • Dimensions (in mm): W62 X H150 X D128
        • Weight: Approx. 1.3kg
      • Standard accessories:
        • Carry case and shoulder strap
        • Quick-connect sampling hose
        • Probe with dust/moisture trap
        • Spare filters
      • Optional Accessories:
        • AC Adaptor (100 VAC/6 VDC)
        • Sensor Stocker
        • Log Data Collection Kit
        • 4 X AA Alkaline batteries

      PROJECT | OPTIMIZE | SUSTAIN