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Gas & Flame Detection, Environment Monitoring

Fixed Gas Detectors >> Gas Detector Transmitters

PS-7 Stand-Alone Detector, for Semiconductor Gases

The PS-7 detector is compact and lightweight, designed for industries using the wide range of industrial specialty gases in the manufacturing process. Such industries include semiconductor, solar cell and electronics manufacturing.

The unique feature of the PS-7:
The same detector can be fitted with various pre-calibrated gas sensors, depending on the gas to be monitored. Therefore, if a customer wishes to change the monitored gas due to a change of manufacturing tools / process, he simply has to replace the existing gas sensor with a new gas sensor pre-calibrated for detecting the new monitored gas no need to replace the whole detector! This increases the flexibility and reduces the long-term cost of ownership for the customer.
The pre-calibrated sensor means that there is no need to introduce calibration gas at site to test, commission or calibrate the detector this increases safety for working personnel and reduces contamination risk to the cleanroom in the event of accidental release of calibration gas.

The other features of the PS-7 include:

  • 4 digit LCD digital display (with units) and split bar graph
  • Long lifespan sampling pump, with automatic flow
  • Error response if a wrong sensor is inserted to the detector with different
  • Analogue and digital outputs for connection to a central supervisory system
  • Alarm response for high gas concentration (2 stage alarm), low flow, trouble

Specifications

List Of Gases Detected:

NH3

SiH4

SiH2

Cl2

AsH3

PH3

Cl2

B2H6

H2Se

GeH4

ClF3

NO

H2S

HCl

HF

HBr

CO

Si2H2

F2

O3

*Not all gases are listed.

  • Power Supply: 24VDC
  • External Outputs:
    • Analog Output: 4-20mA DC (shared with power source negative terminal)
    • Gas Alarm Contact: 1a no-voltage contact/Non-latching
    • Trouble Alarm Contact: open collector/Non-latching
  • Options:
    • ┬áPyrolyser unit for monitoring specific gas types (such as NF3).
    • ┬áDeviceNet interface unit for incorporation into DeviceNet protocol networks (for enhanced communication).

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