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Gas & Flame Detection, Environment Monitoring

Portable Gas Detectors >> Semiconductor Specialty Gas Detectors

XP-703DIII Leak Detector for Semiconductor Gases

The XP-703DIII series gas detectors are an effective tool for finding trace leaks within a short response time. The user-friendly alarm feature varies in frequency depending on the concentration of gas detected (intermittent to continuous alarm). An integrated gas sampling pump is standard.

The X-703DIII is suitable for trace leak detection for gases typically used for semiconductor manufacturing, such as Arsine, Phosphine, Diborane, Silane, Hydrogen etc.

Options available include earphones, telescopic sampling probes and sampling attachments.


Gas detected:

  • arsine
  • phosphine
  • diborane
  • silane, etc.

Options available include:

  • earphones
  • telescopic sampling probe
  • sampling attachments.
Gas TypeArsinePhosphineDiboraneSilaneHydrogen
Min. detectable concentration (ppm)